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Coriolis vibrating gyroscopes can be modeled by a planar resonator, using masses, springs and damping. In this paper, the corresponding equations are studied in order to characterize real vibrating cells. It is shown how to present the problem to allow efficient numerical simulations and analytic developments. In particular, the use of the method of Averaging is fundamental, simplifying most of the...
In [1] we presented a new length extension mode (LEM) piezoelectric micro-resonator. Thanks to a specific design, anchor losses were lowered to maximize the Q.f product and the resonator. Viscous fluid damping is neglected since the resonator is under vacuum and so is the thermoelastic damping for a length extension mode. With a Q predicted over one million the resonator is well suited for MEMS oscillator...
This paper reports a status on performances of the VIG Coriolis Vibrating Gyro developed at ONERA, and compares physical limits of this vibrating structure with promising new geometries for the next generation of sensors. Recent researches focused on a new quartz vibrating structure, nominally free from mechanical coupling between modes. First samples have been realized and characterized. As expected,...
In this paper, the issue related to the quadrature error in a piezoelectric angular rate gyro is studied. Fabrication process and anisoelasticity of the material are known to reduce the performance of the bias stability of micromachined gyros. However, solutions exist to compensate for the quadrature error in silicon-based gyros: DC voltage, parallel capacitance. The principle of operation presented...
ONERA has been developing a Coriolis Vibrating Gyroscope (CVG) named VIG (Vibrating Integrated Gyro). The fabrication process generates structural defects which induce asymetries in the tunning fork geometry. It results in undesirable quadrature error which limitates the performance by increasing sensitivity to phase and temperature variation and causing poor bias stability. This paper deals with...
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