The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper describes the feasibility of a low-temperature diffusion bonding process for Cu thin film electrodes in ambient air. After Cu thin film surfaces were bombarded by an Ar fast atom beam in vacuum to remove the initial thick adsorbate layer, O2 gas was introduced into the vacuum chamber to prevent moisture-induced generation of thick Cu(OH)2 layers, which was considered hydrated. Then the...
A low-temperature bonding of vertical-cavity surface-emitting laser (VCSEL) chips on Si substrates was achieved by using plasma activation of Au films. After the surfaces of Au films were cleaned using an Ar radio frequency plasma, bonding was carried out by contact in ambient air with applied static pressure. The experimental results showed that surface morphological change (the reduction of asperity...
In this paper, we report a development of wafer-scale sealing test using different size micro-resonators. In order to characterize sealing quality, many research groups use vacuum sensors inside a cavity such as a comb-drive resonator or a diaphragm. Since the fabrication processes and structures are somewhat complicated, problems about the cost, yield and restriction of bonding materials can be arisen...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.