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Summary form only given. A flowing argon helicon plasma is formed in a 10 cm diameter, 1.5 m long Pyrex chamber with an axial magnetic field in nozzle or flat configuration, variable up to 1 kG in the source region. Experimental upgrades have allowed for operation at high, pulsed RF powers (up to 10 kW at 13.56 MHz) and low flow rates and pressures (as low as 1 seem and 10-5 Torr). Neutral-collisional...
In this paper, neutral depletion effects in a flowing, low pressure argon helicon discharge in a 10 cm diameter, 1.5 m long helicon source operating at 13.56 MHz with static magnetic fields up to 1 kG in both flat and nozzle configurations, are studied. An initial transient high density peak (>1014/cc), axial variation in the plasma density (>1012/cc), electron temperature (2-30 eV), and neutral...
Discharge initiation at low pressures and flow rates is investigated in the Madison helicon experiment flowing helicon source. At low pressures (below 14-sccm flow rate), a threshold magnetic field exists for discharge initiation which depends on RF power and gas flow rate. Above the threshold magnetic field, RF discharges start only after a significant delay (approximately seconds) and sometimes...
Summary form only given as follows. Measurements are performed on an argon helicon plasma with an axial magnetic field (with and without a magnetic nozzle) of up to 1 kG in the antenna source region and 1.5 kG at the nozzle peak. Discharges are produced for pressures between 0.15 and 5 mtorr with incident 13.56 MHz RF power levels of between 300 and 3000 W. The electron density is determined with...
Summary form only given. Measurements are performed on an argon helicon plasma with magnetic nozzle field. The experimental apparatus consists of a 10-cm-diameter cylindrical Pyrex helicon source region connected to a 55-cm-diameter aluminum expansion chamber. The operating neutral pressure is up to 1 mTorr in the source region and 0.1 mTorr in the expansion region due to chamber cross-sections, a...
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