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We present for the first time digital and deterministic control of slow-light in photonic crystal silicon membranes through atomic layer deposition. Supported by ab initio calculations and our earlier advancements, the tuning of the slow group indices and higher-order dispersion characteristics are observed in the chip-scale Mach-Zehnder interferometers, along with control of the surface-state coupling...
We propose and demonstrate the digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 plusmn 18 pm per hafnium oxide atomic layer is achieved.
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