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An integrated high-sensitivity CMOS MEMS capacitive accelerometer with thermal stability has been designed and demonstrated in this work. Issue of obtaining stable DC bias at input terminals is particularly addressed. Sensitivity of 595 mV/g is achieved in the accelerometer and the overall noise floor is 50 μg/√Hz, which corresponds to an effective capacitance noise floor of 0.024 aF/√Hz. The zero-g...
A novel millimeter-wave 35-GHz bandpass filter using coplanar waveguide structure is fabricated in a 0.18-??m standard complimentary metal oxide semiconductor process. The conductor-backed half-wavelength resonators are utilized to realize stopband characteristics at desired frequencies. A series LC resonant circuit can generate one transmission zero located at 58 GHz. It is also observed that the...
A simple and efficient strained engineering was reported, by implementing a notch-gate into high tensile-stress CESL (contact etch stop layer) process. Low process changes were utilized to modulate channel stress and implant profile for generating enhanced performance without any extra process step needed. Compared to conventional vertical-gate CMOSFET with an additional offset spacer, device with...
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