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In this paper, a novel inertial force sensor which uses a Mach-Zehnder Interferometer (MZI) type optical waveguide made of crystal silicon is proposed. In this sensor, one branched waveguide of the MZI have floating beam structure, and it is intersected with a cantilever for supporting a proof mass in same plane. To prevent optical loss at the intersection, only the intersectional point of floating...
This paper reports the development of an arrayed device, which can act as both transmitter and receiver for ultrasonic pulses in the air. The device is composed of micromachined capacitive structures with parylene diaphragms, each of which can generate large sound pressure and realize high sensitivity based on the non-brittle and flexible characteristics of polymer parylene. By setting a delay time...
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