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This paper reports on the design and experimental verification of the first prototype of a resonant sensing platform based on nanoscaled aluminum nitride Contour-Mode Resonant Sensors (CMR-S) for selective detection of sub-ppb levels of volatile organic chemicals (VOCs). For the first time arrays of 8 nano-CMR-S were fabricated on the same chip and functionalized with two different thiol-terminated...
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions to excite a contour-extensional...
Miniaturized resonant sensors for biological applications are required to operate in liquids and their quality factor (Q) is important in setting their limit of detection. This work presents the first theoretical analysis and experimental verification of the behavior of AlN Contour Mode M/NEMS Resonators (CMRs) in liquids. CMRs are based on in-plane lateral vibrations and therefore deemed to perform...
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) super high frequency (SHF) laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators suitable for the fabrication of narrow-band MEMS filters operating at frequencies above 3 GHz. The device dimensions have been opportunely scaled both in the lateral and vertical dimensions in order...
This paper reports on the design and experimental verification of super high frequency (SHF) laterally vibrating nanoelctromechanical (NEMS) resonators. For the first time, AlN piezoelectric nanoresonators with multiple frequencies of operation ranging between 5 and 10 GHz have been fabricated on the same chip and attained the highest f-Q product (~4.6ldr1012 Hz) ever reported in AlN contour-mode...
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