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In this paper, we proposed a new micro-four-point-probe (mu 4PP) with sharp tips arranged in squire and spacing 20 mum. The mu 4PP consists of a main cantilever and four sub-cantilevers. A thermal actuator based on the bimorph effect is integrated on each sub-cantilever. The four-terminal configuration affords to versatile applications to measure electrical properties. Alternatively, the modified...
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