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For remote and in-situ calibration of translation stage, system comparing optical-path-differences of two distantly-located low-coherence-interferometers through a single-mode-optical-fiber has been developed. Results of 52 nm-deviation and 30 nm-standard deviation for 39 mm-displacement is achieved.
Technique of transferring length-information between two distantly-located low-coherence-interferometers through a single-mode-optical-fiber for remote and in-situ calibration of linear scale is developed. Results of 200 nm-deviation and 100 nm-standard deviation for 50 mm-length is preliminary achieved.
Technique of transferring length-information between two distantly-located low-coherence-interferometers through a single-mode-optical-fiber for remote and in-situ calibration of linear scale is developed. Results of 200 nm-deviation and 100 nm-standard deviation for 50 mm-length is preliminary achieved.
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