Search results for: G.M. Beheim
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 244 - 254
IEEE Electron Device Letters > 2008 > 29 > 5 > 456 - 459
Thin Solid Films > 2007 > 515 > 6 > 3283-3290
Journal of Microelectromechanical Systems > 2008 > 17 > 1 > 244 - 254
IEEE Electron Device Letters > 2008 > 29 > 5 > 456 - 459
Thin Solid Films > 2007 > 515 > 6 > 3283-3290