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This paper reports on design, fabrication, and testing of a piezoelectrically actuated microvalve with integrated sensors for flow modulation at low temperatures. One envisioned application is to control the flow of a cryogen for distributed cooling with a high degree of temperature stability and a small thermal gradient. The valve consists of a micromachined die fabricated from a silicon-on-insulator...
This paper describes a normally open, self-encapsulated, gas valve that has embedded sensors for pressure and temperature monitoring. The valve has been validated at operating temperatures over 80-380 K, and at pressures up to 130 kPa. A perimeter augmentation scheme for the valve seat has been implemented to provide higher flow modulation. Two kinds of suspensions are described for the valve seat...
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