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We have developed biochemical field effect devices with nano-pillar array structure on the gate. The pH responses of the field effect device with nano-pillar structure were nonlinear. It seems that the plasma treatment of the Si3N4 surface as well as a mixed composition of Si3N4 and SiO2 may play an important role for the nonlinearity of the pH response. Oligonucleotide probes with fluorescent label...