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Modelling of MEMS is one of the difficulties faced in advancing the design. The parameters fed to the simulator consist of the material properties and the geometry of the structure. Material wise, researchers are working on developing precise characterisation techniques to ameliorate the mechanical definition of structural material used. More work is now ongoing to ameliorate the fabrication process...
To simulate different topologies of deformable micro structures, some multiphysics softwares that forms our simulation platform are under investigation. The criteria for weighing the software is the precision of the results with an acceptable time of calculation to simulate different models with multiple variables. The existance of COMSOL 3.3, at a time linking all the physics and having a good interactive...
Until nowadays, surface roughness effects were ignored in the analysis, due to the difficulty to generate a rough surface model and also to simplify the model in order to reduce calculation time. However, many engineering fields, such as MEMS, seek to improve the behaviour of the system at the surface level or the interface between surfaces. Thus, with the advance of numerical capabilities, the topography...
Till nowadays, MEMS design suffers from the lake of efficient and easy-to-use simulation tools considering the complete MEMS design procedure, from individual MEMS component design to complete system simulation. Finite element analysis (FEA) methods offer high efficiency and are widely used to model and simulate the behaviour of MEMS components. However, as MEMS are subject to multiple coupled physical...
The need of a powerful multiphysics software, to simulate different topologies of deformable microstructures, is under investigation. The criteria for choosing the software is the precision of the results with an acceptable time of calculation to simulate many models with different variables. The existence of a new software, COMSOL 3.3, at a time linking all the physics and having a good interactive...
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