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The purpose of this paper is to present novel optical imaging techniques, based on all active optical polarimetric principles, for efficient detection, inspection, and monitoring of semiconductor components, microelectronic components, and spacecraft structures. The experimental results of this paper indicate that the polarimetric imaging techniques are highly efficient in detecting defects on the...
The purpose of this study is to present novel optical imaging techniques, based on all active Muller matrix optical polarimetric principles, for efficient detection, inspection and monitoring of semiconductor and microelectronic components, and spacecraft structure. The experimental results of this study indicate that the polarimetric imaging techniques are highly efficient in detecting defects on...
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