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We have developed high-resolution Nb-Al-AlO/sub x/-Al-Nb tunnel junction extreme ultra-violet (EUV) detectors. In the energy range between 25 and 70 eV, we have measured an energy resolution of 2.2 eV full-width at half maximum (FWHM). The energy resolution degrades significantly in the energy range between /spl ap/80 and /spl ap/230 eV where the Nb absorber is partially transparent and some of the...