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For the first time, under exposure is employed to fabricate the patterned photoresist templates with hemispherical cross-sectional profile. The long-range highly regular polymer lens array is replicated from the photoresist templates. The polymer lens array is utilized as the soft phase shift element to produce nearly perfectly periodic nanostructures with sub-100 nm feature size across centimeter-scale...
This paper presents a miniaturized MEMS (microelectromechanical systems)-based electrochemical aptasensor, which utilizes aptamer as the recognition element for simple, sensitive and rapid detection of norovirus. The novelty of this work is integration of micro fabrication technology with aptamers to develop a miniaturized and portable electrochemical sensor for environmental pathogen monitoring....
Horizontally aligned carbon nanotubes (HACNTs) were grown from designated trench sidewalls in silicon substrate with chemical vapor deposition (CVD) system. The silicon trenches were fabricated with microelectromechanical system (MEMS) technology, and Fe catalysts were deposited onto the selected trench sidewalls by tilt angle electron beam evaporation. Characterizations of the as-grown CNTs were...
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