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Density of sputter deposited silicon (Si) thin films was changed by a simple working gas pressure control process, and its effects on the cycling performance of Si films in Li-ion batteries as anodes was investigated. Higher gas pressure results in reduced film densities due to a shadowing effect originating from lower mean free path of sputter atoms, which leads to a wider angular distribution of...
The high volumetric expansion/contraction of silicon (Si) anodes in Li-ion batteries by about ∼400% during lithiation/delithiation causes considerably high stress followed by cracking, pulverization, and the loss of electrical contact; and finally results in capacity fading and failing. In this work, we present a new density modulated multilayer Si thin film anode approach, which can provide a robust...
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