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The use of butterfly-shaped thin plates, formed by reducing the tether-to-plate angle, can raised the quality factor (Q) of aluminum nitride (AlN) Lamb wave resonators (LWRs) by eliminating the anchor loss. The finite element analysis (FEA) simulation results show that the butterfly-shaped plate can efficiently keep the vibration far from the edges at the tether-to-plate plane, so that the acoustic...
A novel technique to enhance the quality factor (Q) of Lamb wave resonator by utilizing an aluminum nitride (AlN) plate formed in a butterfly shape is investigated in this paper. In the conventional design, the Q's of the micromachined Lamb wave resonators are largely harmed by the energy dissipation through the support tethers. The finite element analysis (FEA) simulation results show that the butterfly-shaped...
Acoustic energy leakage through support tethers into the substrate, known as anchor loss, decreases the quality factors (Q) of micromechanical aluminum nitride (AlN) Lamb wave resonators. In this work, we present a theoretical study on the anchor loss of the AlN Lamb wave resonators by using the perfect matched layer (PML) approach in the finite element analysis (FEA) simulation. The anchor loss Q's...
Formation of allowed and stopped frequency bands of elastic wave propagation in the periodic media, also known as phononic crystal (PnC), recently has attracted great attention in enabling high quality factor (Q) electroacoustic devices. To eliminate the anchor loss, the acoustic band gap structures are employed in the support tethers of the aluminum nitride (AlN) Lamb wave resonators. The PnC strip...
In this study the characterization of an aluminum nitride (AlN) double ended tuning fork (DETF) fabricated on a layer of silicon dioxide (SiO2) is presented. The positive temperature coefficients of SiO2 are used to achieve zero TCF for radio frequency (RF) Lamb wave resonators. This paper shows the possibility to integrate temperature compensated Lamb wave resonators with DETF-based devices on a...
This paper reports fine frequency selection techniques for aluminum nitride (AlN) Lamb wave mode resonators (LWR) to control the relative frequency of resonators in an array to 0.1%. The technique that works the best is by adjusting the so-called AlN “overhang” dimension, OH, measured from the center of the outermost electrode to the edge of AlN plate independently of the interdigital transducer (IDT)...
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