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We have grown epitaxial Rhenium (Re) (0001) films on α-Al 2 O 3 (0001) substrates using sputter deposition in an ultra high vacuum system. We find that better epitaxy is achieved with DC rather than with RF sputtering. With DC sputtering, epitaxy is obtained with the substrate temperatures above 700 °C and deposition rates below 0.1 nm/s. The epitaxial Re films are typically composed...