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Using three different analytical tasks, we demonstrated that X-ray diffraction and RBS/channeling are complementary in the characterization of structure quality thin films.Texture measurements performed by X-ray diffraction on the CeO 2 films deposited on sapphire and YBa 2 Cu 3 O 7−x deposited on SrTiO 3 single crystal revealed high quality epitaxy of...
A study of ruthenium dioxide films, deposited by an MOCVD method on Si/SiO 2 , Si/YSZ, LaAlO 3 , MgO, SrTiO 3 , and sapphire single crystal substrates, was performed using RBS, ERD and AFM methods with the aim to characterize the elemental composition, microstructural quality, and homogeneity of the films. The element depth distribution and thickness of the ruthenium oxide...
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