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Cryogenic aerosols formed from either argon and nitrogen or nitrogen gas only have proven successful for high particulate removal without material loss or modification and damage free cleaning of poly silicon line structures. Particle removal efficiency is reported on particulate contamination down to 65 nm. Results on 60 nm poly silicon structures have shown no damage and a particle removal efficiency...
Nanotubes filled with pure Cu and Ge have been formed by using an arc discharge with metal/graphite composite anodes in a hydrogen atmosphere. These nanotubes are found in the soot deposited on the chamber walls instead of on the redeposited rod on the cathode as is the case with experiments in He. Since Cu and Ge do not form stable carbide phases, catalyze carbon fiber growth or have significant...
A method using polycyclic aromatic hydrocarbon (PAH) precursors for synthesizing carbon nanotubes filled with pure copper or germanium is reported. A model is proposed where the interaction of small copper or germanium clusters with PAH molecules is shown to form carbon-encapsulated nanowires. The validity of this model is demonstrated by showing that filled nanotubes are formed in a hydrogen arc...
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