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The effect of various electrodes (Al, W, TiN) deposited by evaporation (Al) and sputtering (W, TiN) on the electrical characteristics of thermal Ta2O5 capacitors has been investigated. The leakage currents, breakdown fields, mechanism of conductivity and dielectric constant are discussed in the terms of possible reactions between Ta2O5 and electrode material as well as electrode deposition process-induced...
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