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We discuss about the controlled self-assembled synthesis of metallic Cu nanoparticles on different substrates such as glass, Al 2 O 3 and SiO 2 at room temperature by the dc magnetron sputtering technique. Deposits have been made using Cu cylindrical target for a 2mTorr Argon sputtering. After deposition, the films were annealed using oven at 400°C for 10min to induce the nucleation...