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Micro-structured electrode (MSE) arrays consist of an interlocked, comb-like, capacitive electrode system with gap widths in the μm range. Large-area uniform glow discharges up to atmospheric pressure were penetrated with our arrays. In order to ignite glow discharges at atmospheric pressure this approach is established next to using dielectric barrier arrays and plasma jets. Because of the industrial,...
Micro-structured electrode (MSE) arrays allow to generate large-area uniform glow discharges over a wide pressure range up to atmospheric pressure. The electrode dimensions in the μm-range realized by means of modern micro-machining and galvanic techniques are small enough to generate sufficiently high electric field strengths to ignite gas discharges applying only moderate radio frequency (RF, 13...
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