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While modulators, waveguides and detectors have been successfully integrated in silicon devices, a laser source still remains a challenge. Unfortunately, in silicon and germanium, indirect band transitions are favored, making laser emission unlikely. Direct bandgap transitions have recently been demonstrated in germanium by introducing tensile strain with heavy n-type doping or by alloying with Sn...
The aim of this study is to evaluate the feasibility to integrate excimer laser annealing (ELA) into the process flow to achieve higher doped and ideally box shaped profiles. The recrystallization, dopant distribution, and activation of boron or arsenic shallow implantations in germanium pre-amorphized silicon are investigated by comparing argon fluoride ELA, flash lamp annealing, and spike annealing...
The in vitro behaviour of bioactive glass coatings grown by Pulsed Laser Deposition on silicon and titanium substrates is presented. The critical thickness of the coatings needed to develop the complete bioactive reactions when immersed in Simulated Body Fluid was evaluated. The influence of the substrate on the reactivity of thin coatings, which lead to the production of calcium phosphate and silica-rich...
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