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The performance of our previously devised thermal multi-parameter wind sensor for gaseous fluids is noticeably influenced by the thermal heat shunt induced by the thin-film membrane where heating and temperature sensing elements are embedded. Consequently, reliable values for the thermal parameters of the thin-film membrane are mandatory for their design and characterization. We present a new method...
We report on a novel method to determine the thermal conductivity, thermal diffusivity, and average emissivity of a thin-film diaphragm embedded in a MEMS multi-parameter wind sensor. Compared to other measurement techniques for thermal thin-film parameters, our method does not require fabrication of custom specimens. The results can be obtained from frequency response measurements directly carried...
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