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As the conversions between the sensing element and interface in the feedback loop and forward path are nonlinear, harmonic distortions appear in the output spectrum, which will decrease the signal-to-noise and distortion ratio. Nonlinear distortions are critical for a high-resolution electromechanical sigma–delta ($\Sigma \Delta $ ) modulator. However, there exists no detailed analysis approach to...
A hybrid micro-accelerometer system consisting of a lateral capacitive silicon micro-acceleration and a CMOS integrated readout circuit is presented. The self-test function of the micromachined accelerometer is realized by electrostatic method. The electrostatic force drives the proof mass to produce an equivalent acceleration. The electrostatic force, pull-in voltage and steady driving displacement...
This paper discusses a novel method of modeling and simulation of anodic bonding technique, which is widely used in fabrication of MEMS device and micro system. The emphasis are the bond expansion model and extended time formula of silicon-glass anodic bonding, and based on which, visual simulation of the process is achieved. In practical experiments, by utilizing the math model, simulation result...
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