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We report composition, thickness and temperature dependent magnetic properties of amorphous Co80-yFeyB20 (x nm) films with y = 40,60 and x = 7–200 nm prepared directly on thermally oxidized Si substrate using magnetron sputtering technique. All the as-deposited films exhibit amorphous structure. For both the compositions, the shape of magnetic hysteresis (M-H) loops strongly depends on their thicknesses,...