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To improve microwave characteristics and the frequency response, and achieve the state conversion, an inline RF MEMS power sensor with an impedance matching structure and a capacitance compensating structure, and two shunt capacitive MEMS switch structures is presented in this paper. This power sensor is accomplished with GaAs MMIC technology. In detection state, experiments demonstrate that the improved...
This letter presents research on a packaging-test-fixture for 8–10 GHz GaAs monolithic microwave integrated circuit-based in-line coupling radio frequency (RF) microelectromechanical systems (MEMS) power sensors by showing the performance of the power sensors embedded into RF circuit systems. The principle of the sensors is to measure a certain percentage of the microwave power coupled into a MEMS...
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