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Large-area reduced graphene oxide (rGO) is demonstrated to emit sound for the first time. The whole device is flexible. The sound emission from rGO has a linear relationship with frequency in wide sound range (1 kHz ∼ 50 kHz). It is suggested that the physic mechanism is fundamentally different from conventional loudspeaker and transducer. Theoretical simulations suggest that the mechanism is related...
Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized...
This paper presents the design, fabrication and testing results of a novel in-plane polarized PZT film based micro-acoustic device for ultrasonic applications. The proposed micro-acoustic device with Pt/PZT/TiO2/SiO2 structure can be used for both microphone and microspeaker due to the piezoelectric effect and converse piezoelectric effect of PZT film. The PZT film is polarized along in-plane direction...
Design optimization of beam-like ferroelectrics-silicon integrated microphone and microspeaker is studied. The Pt/Pb(Zr,Ti)O/sub 3//Pt/SiO/sub 2//Si/sub 3/N/sub 4/ cantilever structure is designed theoretically using multimorph model. The sensitivity and the sound pressure level (SPL) of the integrated microphone and microspeaker are calculated. It is found that the sensitivity of the microphone and...
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