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Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach to form high frequency arrays for real-time 3-D medical imaging. pMUT arrays based on SOI-Si bonding and PZT-coated membrane structures have been designed in this paper. After simulation, the 6×6 ultrasonic transducer array was fabricated and characterized. The total array area is approximately 2.0 mm by 2.0 mm. The micrograph...
Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6times6 pMUT arrays with element pitch down to 150 mum were successfully fabricated and characterized. The devices consist of 2 mum PZT film on a 3 mum Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process...
Micromachined technology has been widely used to reduce device size and improve performance. In this paper, our research activities on micromachined piezoelectric acoustic devices at wide frequency range, from audio microphones to ultrasonic transducers, are reviewed. These devices are based on ferroelectric thin films, and exceed the conventional acoustic devices in excellent performance, miniaturized...
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