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We present a study on the use of corona discharge surface treatment to achieve a fast thermal diffusion bonding process for the creation of microfluidic chips. Wafer level bonding at 100 mm diameter was attempted. Polymethyl methacrylate (PMMA) wafers were hot embossed to create microchannels before bonding to another blank PMMA wafer. Corona discharge treatment of the PMMA resulted in a more hydrophilic...
Microfluidic devices offer an attractive route towards the miniaturization of chemical and biological processes in lab-on-chip applications. Lab-on-chips can be fabricated from inexpensive polymers such as polycarbonate (PC), poly-methyl methacrylate (PMMA) and cyclic olefin co-polymers (COC). Hot embossing of polymers is an attractive route to fabricating chips with feature dimensions ranging from...
The integration of a PDMS membrane within orthogonally placed PMMA microfluidic channels enables the pneumatic actuation of valves within bonded PMMA-PDMS-PMMA multilayer devices. Here, surface junctionalization of PMMA substrates via acid catalyzed hydrolysis and air plasma corona treatment were investigated as possible techniques to permanently bond PMMA microfluidic channels to PDMS surfaces. FTIR...
We report on the hot roller embossing of polymer sheets for the creation of microfluidic structures. Measurements conducted on 100 mum features showed that the lateral dimensions could be replicated to within 2% tolerance, while over 85% of mould depth was embossed. Feature sizes down to 50 mum and feature depths up to 30 mum had been achieved. At lower temperatures, asymmetric pile up of polymer...
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