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A thorough understanding of ion-solid surface interactions is important for the predictive modeling of ionized metal plasma (IMP) Cu physical vapor deposition (PVD) at feature scales. Besides sticking coefficients and sputter yields, characterizations such as angular distributions of sputtered and reflected particles, and thermal-accommodation coefficients are also needed as inputs for a feature scale...
A combined reactor scale and feature scale Monte Carlo model of sputter deposition has been developed. The model is based on the statistically averaged behavior of a large number of sputtered atoms which undergo gas phase collisions in the physical vapor deposition (PVD) chamber and surface interactions within the reactor scale and feature scale domains. The feature scale module is directly coupled...
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