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A femtosecond Ti:sapphire laser was used to ablate samples of copper, strontium titanate (STO), a nickel alloy René 88DT (R88), {111}-oriented single crystal silicon, and gallium nitride (GaN) in situ in a focused ion beam scanning electron microscope (FIB-SEM). The laser beam was scanned parallel to the specimen surface, which resulted in laser ablation using the tail of the Gaussian beam distribution,...
Femtosecond laser ablation offers the unique ability to remove material at rates that are orders of magnitude faster than existing ion beam technologies with little or no associated damage. By combining ultrafast lasers with state-of-the-art electron microscopy equipment, we have developed a TriBeam system capable of targeted, in-situ tomography providing chemical, structural, and topographical information...
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