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Calcium copper titanium oxide (CaCu3Ti4O12, CCTO) films of 400nm thickness were deposited on ITO and FTO substrates by radio-frequency (RF) magnetron sputtering at different deposition temperatures (100, 150, 200, and 250°C). The influences of deposition temperatures and substrates on the structural, morphological, and optical properties of CCTO films were systematically investigated by XRD, AFM and...