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This study addressed the issue of automated material handling systems (AMHS) in the photolithography zone of a 300mm (12-in.) wafer fab facility. The lithography process accounts for 40–50% of the time required to produce wafers. Therefore, managing the AMHS in the photolithography zone is a challenging task. This paper examines the dispatching rule and the number of vehicles in variable wafer input...
The Automated Materials Handling System (AMHS) in semiconductor industry is a significant to reduce the wafer cycle times and enhance the fab productivity. The determination of vehicle number, however, is challenging due to the complicated facility layout and the multiple reentries required in the manufacturing process. Previous research used to solve this problem based on the mathematical programming...
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