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We report on the effect of molecular structure and substrate material on amorphous carbon nitride (a-CN:H) electrode properties including film adhesion to the substrate and electrochemical properties. Films were prepared by neutral beam enhanced chemical vapor deposition on different substrate materials (p-type Si, Cu, Ti, and Pt) below room temperature. When depositing on Si, doping nitrogen into...
Amorphous hydrocarbon (aCH) material is receiving plenty of attention due to its possible wide application. However, one hurdle facing this application is that high temperature is required to express conductivity of aCH, e.g., post annealing or deposition at high temperature. To form a conductive aCH on a substrate controlled below room temperature, we have developed a neutral beam enhanced chemical...
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