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Reported are high-performance solenoid transformers concave suspended in standard (low resistivity) silicon wafers by using a post-CMOS microelectromechanical systems process. The concave-suspended structure of the transformers effectively depress the substrate effects including eddy current and capacitive coupling between the solenoids and substrate, thereby achieving both high-Q factor and broad...
Solenoidal-DNA-configured transformers are fabricated in standard silicon substrate by using a post-CMOS concave-suspending MEMS process. The concavely suspended structure of the transformer effectively depresses the substrate effects including eddy current and capacitive coupling between the coil and the substrate, thereby, achieving both high Q-factor and high resonant frequency for the self-inductors...
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