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A beam width measurement system has been developed for keV submicron ion beams of 0.1 μm or less in width assuming a round shape beam. The system enables to measure beam current change as a function of knife-edge position by cutting a beam focusing point (beam spot) with the sharp edge within a spatial resolution of 0.02 μm. The width of 30 keV order submicron H + ion beam was estimated by...