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The aim of this work is the development and characterisation of innovative ceramic coatings for cutting tools with high wear resistance properties at high temperatures. This objective arises from the industrial need of reducing machining time and consumption of lubricants, in order to reduce machining costs, environmental impact and health risks for the operators.The use of coatings for cutting tools...
Growth of 3C–SiC on (100) Si wafers has been carried out by low pressure chemical vapor deposition (LPCVD), using a H 2 + SiH 4 + C 3 H 8 gas mixture at about 1000°C. No carbonization layer was performed. Micro-Raman measurements yield the presence of microcrystalline SiC matrix, while neither carbon nor silicon clusterization in amorphous phase was detected with optimized...
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