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We demonstrated the enhanced terahertz transmission through superconducting NbN subw ave length hole arrays. The transmission peak value and frequency exhibit thermal tuning behaviors, which can be attributed to the temperature-dependent complex permittivity of superconducting film. The microscopic hybrid wave model was adopted to analyze the role of surface waves in the enhanced transmission theoretically...
Electromigration and resistivity of Cu, Co and Ru on-chip interconnection have been investigated. A similar resistivity size effect increase was observed in Cu, Co, and Ru. The effect of liners and cap, e.g. Ta, Co, Ru and SiCxNyHz, on Cu/interface resistivity was not found to be significant. Multilevel Cu, Co or Ru back-end-of-line interconnects were fabricated using 10 nm node technology wafer processing...
In the context of underground cavern facilities, electrical power substation is now located underground instead of the conventional aboveground. The operating environment of power system has therefore changed, which may directly degrade the heat dissipation capability of the power system. A condition monitoring and reliability analysis of power facilities for underground substations in high humidity,...
This paper presents a novel high temperature SOI pressure sensor utilizing Cu-Sn wafer level bonding. Fabrication process and bonding procedure are described in detail. For high temperature operation, heavily doped piezoresistors and TiSi2/Ti/ TiN/Pt/Au ohmic contact electrode are specially designed. To fabricate Cu sealing ring on the wafer with 380pm-deep cavities, spray coating method has been...
Micro-Thermal Conductivity Detectors (µTCDs) have been designed, fabricated and tested in a gas chromatography system to show a correlation between detector design and the mean free path of the carrier gas. Our tests show that for a fixed detector design, the maximum possible response is limited by the Knudsen number (the ratio of the mean free path of the gas and chamber critical dimensions). Therefore,...
We have developed a novel, calibration free, micro electromechanical device and method for the measurement of linear flow rate in a micro-gas chromatography (GC) system This design enables the integration of a flow rate measurement with a high sensitivity thermal conductivity detector (TCD) reported at MEMS 2009. Accurate knowledge of the flow rate is of vital importance when quantifying the results...
Light emitting diodes (LEDs) are emerging as viable replacements for incandescent-based cap lamps used in mining. The photometric and energy characteristics of these light sources differ in important ways. The present paper describes the performance of LED and incandescent sources in cap lamps in terms of correlated color temperature, color rendering, light output, electric power, ambient temperature...
We have grown Si/SiGe modulation doped quantum wells by gas source molecular beam epitaxy using, for the first time, arsenic as an n-type dopant. The layers are characterised by magnetotransport measurements and SIMS analysis. The latter shows an arsenic concentration in excess of 1019 cm??3 along with strong surface segregation.
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