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This paper presents an on-chip miniaturized MEMS tunable laser, with a 3-dimensional micro coupling system to improve the coupling efficiency and side mode suppression radio. The prototype is fabricated on an SOI wafer by DRIE process. It obtains a coupling efficiency as high as 76.5%. It offers an improved tuning over a range of 48 nm. Compared with other hybrid-integrated tunable lasers, the compact...
The polarization of electromagnetic (EM) wave plays an essential role in the application of optoelectronics, life science microscopy and photographic display[1]. The conversion of EM wave in one polarized direction to its orthogonal direction is usually quite weak in natural materials. This paper presents a tunable metamaterial which rotates the polarized direction up to 20° in THz regime. The metamaterial...
This paper reports a 3-dimensional (3D) micro-optical coupling system for improving coupling efficiency in the Littrow configured micro-electro-mechanical system (MEMS) tunable lasers. In the coupling system, an optical fiber acts as a rod lens for light convergence in the vertical plane, while a deep-etched silicon parabolic mirror confines the light in the horizontal plane. Compared with previous...
For the first time, we demonstrate experimentally high optical quality factor Q ~9000 in MEMS-compatible silicon Fabry-Pérot (FP) resonators based on free space propagation of light and direct coupling to optical fiber. This result is obtained on long cavity resonators (L >; 250 μm), a usually difficult case in terms of power loss. The resonator design includes two multilayered silicon-air Bragg...
This paper reports an integrated injection-locked laser constructed using microelectromechanical systems (MEMS) technology, which achieves a large wide locking range of 43 nm with an average SMSR of 32 dB.
This paper covers design, fabrication, packaging and experiments of photonic Microelectromechanical Systems (MEMS) tunable laser sources. Two different types of MEMS tunable lasers, which are MEMS coupled-cavity lasers and dual-wavelength tunable lasers, are demonstrated as examples of natural synergy of MEMS with photonics. The expansion and penetration of the MEMS technology to silicon nano-photonics...
We present a novel and compact six-mirror cavity configuration to combine four beams intracavity for energy scaling. A single beam output exceeding 453 mJ with 165 mus duration is obtained, with the combination efficiency of 90.7%.
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