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FinFET devices are extensively investigated due to the prospects for application in the sub-100 nm CMOS integrated circuits fabrication. Small size of the FinFETs and the properties of technological processes strongly influence their electrical characteristics. The random variations of the characteristics lead to a mismatch effect critical from the viewpoint of design and fabrication. In the paper...
A MPW service has been arranged in the ITE in order to offer facility to academies for prototyping of CMOS ICs. This service is based on the proprietary CMOS process. The technology has been characterized via electrical measurements of dedicated test structures. The characteristics have been implemented in the form of design kit. Cadence reg design system has been chosen as a target tool for ICs design...
Preparation of pH-sensors and structures ready for ion-sensitive coating for in-line water pollution monitoring was the aim of the paper. Au and AgCl electrodes with Au backside contacts were developed using mono-Si substrates. Sequence of manufacturing process was presented. Device series resistance and potentiometric response were positively tested. ISFET pH sensors were manufactured and fully characterized...
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