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In this study we have measured and analyzed characteristics of real transistors on dynamic random access memories (DRAM) including cell transistor by using nano-probing system for improved failure analysis. Measuring results of the conventional pad probing and nano-probing were compared on test element group (TEG) patterns of large transistors. The transistor characteristics of nano-probing results...
Gate induced drain leakage (GIDL) characteristics were investigated with the recessed channel array transistor (RCAT) for DRAM, using the elevated source drain (ESD). The lower doping concentration of a source-drain region in the ESD structure reduces the electric field, which reduces drain leakage current and also the fluctuation of leakage current. These reductions can enhance the data retention...
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