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We studied the gas permeation properties of poly(ether ether ketone) (PEEK) and compared it with two other polymers commonly used in the construction of semiconductor microenvironments, polycarbonate (PC), and poly(ether imide) (PEI). The PEEK specimens consisted of extruded films as well as compression‐ and injection‐molded specimens. The compression‐molded specimens were prepared to achieve the...
Permeability (P) and diffusion (D) coefficients were measured for hydrogen chloride and ammonia gas through a tetrafluoroethylene — perfluoroalkoxy (PFA) copolymer using standard manometric techniques. These data were subsequently used to estimate the performance characteristics, such as breakthrough times and permeation rates, of a representative chemical distribution system that may be found inside...
The mass transport properties of four micro-environment (ME) materials were tested: polycarbonate (PC), poly(ether imide) (PEI), poly(ether ether ketone) (PEEK) and the Entegris barrier material (EBM). Permeation, diffusion and solubility coefficients of water vapor were measured at room temperature with 45% and 100% relative humidity (RH). These mass transport coefficients were used to estimate the...
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