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An optimization of e beam inspection (EBI) new methodology is implemented to monitor the defective issues in semiconductor manufacturing. The benefits of optimized e beam inspection methodology not only can switch the care area among the inspection tools, but also minimize the inspection shots and the time consumption in EBI application. Inspect tiny physical defects with high throughput using EBI...
FOUP mini-environment in-line contaminants analysis is introduced into 55nm technology node product. It demonstrates that the inorganic ions /VOC contaminants of some processes cannot be resolved by FOUP N2 purge action only, special taking good care for critical layers to prevent the irretrievable yield loss is necessary. The performance of FOUP N2 purge at different kinds of module processes are...
The oxide loss behavior of buffered hydrofluoric (BHF) acid etch solution with elapsed time was investigated with and without advanced process control system (APC). The oxide loss amount increases with increasing the elapsed time in etching solution of BHF. The variation of BHF solution is considerable improved by at least to zero at run to run with APC. The result indicates this system is a promising...
Thanks to the advances of data acquisition techniques, we can acquire ventricular blood flow data with very high quality. This extremely complex spatiotemporal data calls for novel visualization and analysis tools. In particular, the new tools need to assist domain experts in quick identification of critical patterns. In this paper, we present a method using topo-logical data analysis tools with simulated...
Spam has become a critical problem on Twitter. In order to stop spammers, security companies apply blacklisting services to filter spam links. However, over 90% victims will visit a new malicious link before it is blocked by blacklists. To eliminate the limitation of blacklists, researchers have proposed a number of statistical features based mechanisms, and applied machine learning techniques to...
Color abnormal phenomenon in post Cu chemical mechanical planarization (CMP) is found in 3X nm flash memory. TEM cross-section shows that there is no Cu residue but has localized thickness variation. This color abnormal phenomenon cannot be eliminated with subsequently Cu and barrier polishing. According to experimental results, the non-uniform inhibitor distribution of Cu slurry issue will enhance...
Generally CD (critical dimension) measurement is an important role for verify the FEM (Focus Exposure Matrix) process window. However, the generally CD measurement is rough due to only measure few site in wafer. The results cannot get the high accuracy information for verification the FEM process window and waste a lot of FEM process time. In this paper, we have demonstrate a new methodology that...
The goal of this research is to improve bending issue and etch durability of amorphous carbon hard mask film (APF). The design of experiments (DoE) employed variable conditions of the spacing, RF power, precursors flow (C3H6 or C2H2) and temperature. High Young's modulus and high sp3/sp2 bonding ratio can increase the etching resistance, and strengthen the high aspect ratio patterning structures.
ICSC-SMM'15 is the fourth International Workshop on Semantic Multimedia. The aim of the workshop is to promote the state-of-the-art research regarding semantic multimedia. The ICSC-SMM' 15 workshop provides a forum for researchers, engineers, and scientists in affiliated disciplines to present their latest research progress, exchange brilliant ideas/thoughts, and explore new research directions. We...
Video quality assessment plays an essential role in multimedia systems and services. In the case of scalable video coding, which enables dynamic adaptation based on terminal capabilities and heterogeneous network, variable resolution is one of the most prominent types of video distortions. In this paper, we propose a new spatial distortion metric for evaluating video streaming quality with variable...
Despite the great demand on and attempts at package express shipping services such as the same-day delivery feasible for online firms, turning a profit is still difficult. To develop more economical or even cost-free transportation of packages, in this paper, we propose to make use of the existing taxis on the street that are delivering passengers, in a crowd-sourced manner. To the best of our knowledge,...
In this paper, a structure model of Spatially Modulated(SM)photodetector(PD) is accomplished in SILVOC-A. Optical spectrum response and AC characteristic of photodetector are simulated on the model. Based on the simulation, large-area PD are chosen for the monolithic integration with a trans-impedance amplifier and a preamplifier. A proposed monolithic optoelectronic integrated receivers are fabricated...
This paper presents a novel readout circuit for micro-mechanical resonant sensors. To determine the sensor's resonance frequency and quality factor, the sensor is briefly excited, after which the exponentially-decaying ring-down current produced by a piezoelectric transducer is read out by an auto-zeroed trans-impedance amplifier (TIA). An auto-zeroed comparator then detects zero- and level-crossings...
In this paper, a three-level model of micro bolometer was established by intellisuit software. The total heat capacity, resistance and device thermal conductance Gdev (lower limit) was obtained by theoretical calculation, resistance extraction and dynamic thermal finite element simulation respectively. According to the relationship among of the bias current, effective thermal conductance and device...
The traffic of mobile network environment is increasing day by day. When a large amount of data need to be transmitted, the low-speed wireless network today is hard to meet users' needs. Long response time of operation and high requirements of terminal's performance will keep user annoy and away. Existing independent data compression and transmission algorithm can't solve this problem effectively...
The joint Cramer-Rao Bound (CRB) of carrier frequency offsets (CFO) and channel Impulse responses (CIR) are derived in this paper to verify the Maximum-Likelihood (ML) estimation performance for multiple input multiple output (MIMO) orthogonal frequency division multiplexing (OFDM) coordination on multiple point (CoMP) systems in this paper. The simulation results verify the theory analysis:ML performance...
We conducted a subjective study wherein we found that viewers' Quality of Experience (QoE) was strongly correlated with the empirical cumulative distribution function (eCDF) of the predicted video quality. Based on this observation, we propose a rate-adaptation algorithm that can incorporate QoE constraints on the empirical cumulative quality distribution per user. Simulation results show that the...
In the process of power grid operation-maintenance management, the information of equipment cannot be monitored in a full view. And the resources of operation-maintenance are still hard to deploy. The judging of failures is not efficiency. The locale jobs such as patrol, maintenance, repairing are hard to control. This paper mainly research and analyze the integration controlling platform of power...
Different nonlinear compensation techniques are compared for the first time, and 57.5-Gbps 60-km IMDD OFDM transmission is achieved. The loss budget of 32 or 29 dB is demonstrated to support 40-Gbps 64-ONUs or 50-Gbps 32-ONUs over 60-km LR-PON without amplifiers.
Silicon-photonic links are projected to replace the electrical links for global on-chip communications in future manycore systems. The use of off-chip laser sources to drive these silicon-photonic links can lead to higher link losses, thermal mismatch between laser source and on-chip photonic devices, and packaging challenges. Therefore, on-chip laser sources are being evaluated as candidates to drive...
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