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We present a simple and low-cost fabrication process for microcantilevers from both pure Polymethylmethacrylate (PMMA) and magnetic PMMA composites with maghemite nanoparticle concentrations up to 3 vol.% (12 wt.%). The fabricated cantilevers have lengths of 30 – 300 µm, widths of 14 µm and a thickness of 3 µm. The presented fabrication process consists of structural layer patterning by hot embossing,...
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