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In silicon power semiconductors, platinum is used to improve the switching characteristics of the devices by adjusting the lifetime of the minority charge carriers. Platinum diffusion in silicon has been a research topic for many scientists over the past decades. Herein, the current state of knowledge is presented together with the concepts developed for its use in silicon power devices. The relevant...
Close to the wafer surfaces, our platinum diffusion experiments were found to be at gross discrepancy with the predictions of well-established diffusion models. These differences are associated with the ramping-down of the temperature at the end of the diffusion processes. To obtain a consistent model able to explain the experiments reported previously in the literature together with our experiments,...
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