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We present a comparative study of the viscoelasticity of parylene C (PPXC) by using Nano-DMA (Dynamical Mechanical Analysis) and Molecular Dynamics (MD) simulations. By applying sinusoidal loading on PPXC films at different temperatures and frequencies, the complex modulus and glass transition temperature (Tg) of the PPXC were obtained. The predicted Tg determined from the temperature-dependent density...
The glass transition temperature of as-deposited parylene-C is first measured to be 50°C with a ramping-temperature-dependent modulus experiment. The creep behavior of parylene-C film in the primary and secondary creep region is then investigated below and above this glass transition temperature using a dynamic mechanical analysis (DMA) machine Q800 from TA instruments at 8 different temperatures:...
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