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The integration of photonic devices with electronic circuit using CMOScompatible process is presented in this paper. Issues and challenges in the design of process integration are discussed.
Summary form only given. The effects of UV irradiation on the particle growth were studied in low pressure capacitively-coupled silane plasmas. The growing speed of the particles increased when UV was irradiated on the plasmas. The particle growth was monitored two dimensionally by the laser light scattering method. The particles grew about 100 nm in diameter and dragged out toward the chamber wall...
The laser light scattering (LLS) is a powerful method for size measurement of dust particles in plasmas. Several two dimensional measurement tools have recently been developed, but measurement of particle size < 100 nm was limited because of the weak incident beam intensity attributed from implementing a sheet beam as the incident laser beam. In this work, multi optical passes were adopted using...
Summary form only given. Measurement of dust particle density was performed using the single-pass laser extinction method, in which particle density was obtained using the relation between particle density and the difference between two He-Ne laser beam intensities with and without passing a dusty plasma. The dusty plasma was prepared by externally-injecting known-sized (65 nm-3 mum) mono-disperse...
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